High current capable access device for three-dimensional solid-state memory

ABSTRACT

The present invention generally relates to three-dimensional arrangement of memory cells and methods of addressing those cells. The memory cells can be arranged in a 3D orientation such that macro cells that are in the middle of the 3D arrangement can be addressed without the need for overhead wiring or by utilizing a minimal amount of overhead wiring. An individual macro cell within a memory cell can be addressed by applying three separate currents to the macro cell. A first current is applied to the memory cell directly. A second current is applied to the source electrode of the MESFET, and a third current is applied to the gate electrode of the MESFET to permit the current to travel through the channel of the MESFET to the drain electrode which is coupled to the memory element.

BACKGROUND OF THE INVENTION

1. Field of the Invention

Embodiments of the present invention generally relate tothree-dimensional solid-state memory and a method for addressing memorycells in a three-dimensional arrangement.

2. Description of the Related Art

Phase change memory (PCM) is a type of non-volatile memory technology.PCM is an emerging technology and a candidate for storage class memory(SCM) applications and a serious contender to dislodge NOR and NANDflash memory in solid state storage applications and, in the case ofNAND flash, solid-state drives (SSDs). PCM functions based uponswitching a memory cell, typically based on chalcogenides such asGe₂Sb₂Te₅, between two stable states, a crystalline state and anamorphous state, by heating the memory cell. To heat the memory cell, anelectrical current flows through the PCM cell. For an effective memorydevice, numerous PCM cells will be present in an array. Each of the PCMcells needs to be addressed, programmed and read with low overheadelectrical wiring. The PCM cell is the phase-change cell itself, and PCMdevice, as discussed herein, is the set of PCM cells plus accompanyingheaters (represented by a resistor in the electrical diagrams). The PCMdevice is the memory element herein.

An array 100 of PCM cells is frequently arranged with a selectingtransistor 102 in series with each memory cell 104 as shown in FIG. 1A.Word lines (WL) and bitlines (BL) are arranged so that each memory cell104 can be programmed or queried. A row of PCM cells is activated by asingle word line WL and each one of the PCM cells 104 in that row willaffect the bitline BL to which it is electrically connected according tothe state of the PCM cells 104, i.e. according to the PCM cells 104being in their high (amorphous) or low (crystalline) resistance state.As shown in FIG. 1A, a simple array 100 of PCM devices 106 is shown. Thearray 100 is a two dimensional array because the PCM devices 106 are allarranged along a common plane.

In an alternative design commonly named “cross-point”, shown in FIG. 1B.Each interception of word lines WL in the x direction and bit lines BLin the y direction has a PCM device 106, which includes the PCM cell 104itself and its heater (represented by a resistor). Frequently, aselecting device is added in series with the PCM device. This selectingdevice can be a diode or a transistor. The selecting device, diode ortransistor, added to the cross-point array 110, or alternatively, usedexternally to the array of PCM cells may frequently become the limitingfactor on how dense can the PCM array become.

When the selecting device is added to the cross-point array, there willbe one selecting device per PCM device 106. Current requirements of thePCM device 106 need to be met by the selecting device. In consequence,even when the PCM device 106 can be made small to the lithographic limitand occupy only 4 F² of area, where F is the half-pitch criticaldimension in a lithographic technology, the selecting device mightrequire 30 F² if it is a CMOS transistor or 10 F² if it is a bipolartransistor. Optimized diodes, where efforts to make them very conductivemight attend the current requirement of a PCM device using 4 F² area andare therefore very frequently considered as selecting device in crosspoint memories using PCM or any memory device requiring significantcurrents for operation.

Unfortunately, using diodes makes it very difficult to extend theconcept of cross-point array 110 from a two-dimensional (2D) array to athree-dimensional (3D) array. In a 3D array, addressing the PCM devices106 that are in the middle of the array is difficult.

Therefore, there is a need for a PCM device that permits each PCM cellto be accessed individually while minimizing the use of the surface areaof the substrate over which the PCM device is disposed as well asminimizing the overhead wiring utilized to address PCM cells in themiddle of the PCM 3D array.

SUMMARY OF THE INVENTION

The present invention generally relates to three-dimensional solid statememory cells and arrangements thereof. Examples of suitablethree-dimensional solid state memory cells include PCM. In oneembodiment, a three-dimensional solid state memory cell comprises athree-terminal device; a first electrical connector coupled to thethree-terminal device, the first electrical connector extending along afirst axis and a second axis perpendicular to the first axis; a secondelectrical connector coupled to the three-terminal device; a memory cellcoupled to second electrical connector, the memory cell disposed alongthe second axis; and a third electrical connector coupled to the memorycell, the third electrical connector extending along the second axis andalong a third axis perpendicular to both the second axis and the firstaxis.

In another embodiment, a method of addressing a memory cell in athree-dimensional solid state memory cell is disclosed. The memory cellcomprises a three-terminal device; a first electrical connector coupledto the three-terminal device, the first electrical connector extendingalong a first axis and a second axis perpendicular to the first axis; asecond electrical connector coupled to the three-terminal device; amemory cell coupled to second electrical connector, the memory celldisposed along the second axis; and a third electrical connector coupledto the memory cell, the third electrical connector extending along thesecond axis and a third axis perpendicular to both the second axis andthe first axis. The method comprises applying an electrical current tothe first electrical connector; applying an electrical current to thethird electrical connector; and applying an electrical current to thethree-terminal device.

In another embodiment, a method of addressing a memory cell in athree-dimensional solid state memory cell is disclosed. The memory cellcomprises a plurality of macro cells that each comprise a three-terminaldevice; a first electrical connector coupled to the three-terminaldevice, the first electrical connector extending along a first axis anda second axis perpendicular to the first axis; a second electricalconnector coupled to the three-terminal device; a memory cell coupled tosecond electrical connector, the memory cell disposed along the secondaxis; and a third electrical connector coupled to the memory cell, thethird electrical connector extending along the second axis and a thirdaxis perpendicular to both the second axis and the first axis. Themethod comprises applying a first electrical current to the firstelectrical connectors of a first plurality of macro cells; applying asecond electrical current to the second electrical connectors of asecond plurality of macro cells; and applying a third electrical currentto the three-terminal devices of a third plurality of macro cells,wherein the first electrical current, the second electrical current andthe third electrical current are collectively applied to a single macrocell.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentinvention can be understood in detail, a more particular description ofthe invention, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this invention and are therefore not to beconsidered limiting of its scope, for the invention may admit to otherequally effective embodiments.

FIG. 1A is a schematic isometric view of a prior art memory cell 100.

FIG. 1B is a schematic cross-sectional view of a prior art memory cell110.

FIG. 2 is an isometric illustration of a macro cell 200 for use in a PCMcell according to one embodiment.

FIG. 3 is an isometric view of a PCM-based building block array 300having two macro cells 200A, 200B arranged side by side.

FIG. 4 is a schematic isometric view of a PCM-based memory buildingblock array 400 having a plurality of macro cells 200A-200D arrangedside by side.

FIG. 5 is a schematic isometric view of a 3D PCM-based memory array 500having a plurality of macro cells 200A-200H.

FIGS. 6A-6D are schematic isometric illustrations of a 3D PCM-basedarray 600 according to one embodiment.

FIGS. 7A-7C are schematic illustrations of a metal semiconductor fieldeffect transistor (MESFET) 208 according to one embodiment.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements disclosed in oneembodiment may be beneficially utilized on other embodiments withoutspecific recitation.

DETAILED DESCRIPTION

In the following, reference is made to embodiments of the invention.However, it should be understood that the invention is not limited tospecific described embodiments. Instead, any combination of thefollowing features and elements, whether related to differentembodiments or not, is contemplated to implement and practice theinvention. Furthermore, although embodiments of the invention mayachieve advantages over other possible solutions and/or over the priorart, whether or not a particular advantage is achieved by a givenembodiment is not limiting of the invention. Thus, the followingaspects, features, embodiments and advantages are merely illustrativeand are not considered elements or limitations of the appended claimsexcept where explicitly recited in a claim(s). Likewise, reference to“the invention” shall not be construed as a generalization of anyinventive subject matter disclosed herein and shall not be considered tobe an element or limitation of the appended claims except whereexplicitly recited in a claim(s).

The present invention generally relates to a PCM cell and arrangementsthereof. The PCM cell is used as illustrative purposes only. It iscontemplated that other memory cells like tunnel magneto-resistive (TMR)cells, or other memory cell element where information is stored by itschange of resistance, could be used without departing from the spirit ofthe invention. In the case of spin-transfer torque TMR, current for theswitching of the cell needs to be applied in two directions, and such arequirement will also be attended by the invention in this patentapplication. A PCM-based building block as used herein is comprised ofnumerous macro cells. FIG. 2 is an isometric illustration of a macrocell 200 according to one embodiment. The macro cell 200 includes anelectrically insulating spacer 202 at the bottom of the macro cell 200in order to electrically insulate the macro cell 200 from underlyingconductive material, such as transistors or adjacent macro cells.Suitable materials that may be utilized for the electrically insulatingspacer 202 include silicon dioxide, silicon nitride, and siliconoxynitride.

The macro cell 200 also includes a selecting three-terminal device 208,which could be a MESFET. As will be discussed below, the three-terminalselecting device 208 will have its gate electrode if it is a MESFETcoupled to a control device external to the three-dimensional array todeliver electrical voltage or current to the gate electrode of thatthree-terminal device 208. The three-terminal device 208 is electricallycoupled to a first electrical connector 206. The first electricalconnector extends along a first axis 216 as well as a second axis 218that is perpendicular to the first axis 216. As shown in FIG. 2, thethree-terminal device 208 is coupled to the first electrical connector206 along the second axis 218. It should additionally be noted that thegate of the three-terminal device 208 extends along another axis 222that is perpendicular to both the first axis 216 and the second axis218. The portion of the first electrical connector 206 that extendsalong the first axis 216 is utilized to provide electrical current tothe source of the three-terminal device 208.

Those skilled in the art will recognize that a MESFET can be acompletely symmetric device and its source and drain terminals bedefined only after voltage levels are applied. In such, a MESFET willsupport current flow in two directions through the memory cell element.

The macro cell 200 also includes a memory cell 212 that is disposedalong the second axis 218 and electrically coupled to the three-terminaldevice 208 by a second electrical connector 210. The second electricalconnector 210 is coupled to both the drain of the three-terminal device208, if the three-terminal device 208 is a MESFET, as well as the memoryelement. The memory cell 212 is also coupled to a third electricalconnector 214. The third electrical connector 214 extends both along thesecond axis 218 and along a third axis 220 that is perpendicular to boththe first axis 216 and the second axis 218. Another electricallyinsulating spacer 204 is coupled to the third electrical connector 214to electrically insulate the macro cell 200 from adjacent macro cells.

To address the macro cell 200, electrical voltage or current is appliedto three distinct locations of the macro cell 200. First, electricalvoltage or current is applied to the first electrical connector 206.Second, electrical voltage or current is applied to the gate of thethree-terminal device 208 if the three-terminal device 208 is a MESFET.Third, electrical voltage or current is applied to the third electricalconnector 214. When all three voltage or currents are applied to thesame macro cell 200, then the macro cell 200 is addressed such that datamay be written or read from the memory cell 212. Memory cell 212 in thisillustrative description represents the PCM cell and its heater, butother memory cell elements could be used such as magnetoresitive memoryelements, or other variable resistance elements as well.

FIG. 3 is an isometric view of a PCM-based building block array 300having two macro cells 200A, 200B arranged side by side. As can be seenfrom FIG. 3, each macro cell 200A, 200B contains electrically insulatingspacers 202, 204, first electrical connectors 206, selectingthree-terminal device 208, second electrical connectors 210, memorycells 212, and third electrical connectors 214. However, while the firstelectrical connector 206 of one of the macro cells 200A extends alongboth the first axis 216 and the second axis 218, the first electricalconnector 206 of the other macro cell 200B extends along the first axis216 and another axis 302 that is parallel to the second axis 218 andperpendicular to the first axis 216. Additionally, the third electricalconnector 218 of one macro cell 200B extends along an axis 304 that isparallel to the third axis 220. Finally, the selecting three-terminaldevice 208 of one macro cell 200B extends along an axis 306 that isparallel to the axis 222 that the three-terminal device 208 of the othermacro cell 200A extends along.

In addition to extending along the first axis 216, the first electricalconnectors 206 of both macro cells 200A, 200B are electrically connectedtogether. Thus, when electrical current is applied to the firstelectrical connector 206 of one macro cell 200A, electrical current isalso applied to the first electrical connector 206 of the other macrocell 200B. Additionally, when electrical current is applied to the firstelectrical connectors 206, electrical current is also applied to thesource of the three-terminal devices 208 of both macro cells 200A, 200B.

FIG. 4 is a schematic isometric view of a PCM-based memory buildingblock array 400 having a plurality of macro cells 200A-200D arrangedside by side. Macro cells 200A, 200B are as discussed above with regardsto FIG. 3, but two additional macro cells 200C, 200D have been added.Similar to macro cells 200A, 200B, macro cells 200C, 200D each haveelectrically insulating spacers 202, 204, first electrical connectors206, three-terminal devices 208, second electrical connectors 210,memory cells 212, and third electrical connectors 214. However, thefirst electrical connectors 206 for macro cells 200C, 200D are along adifferent axis 402 as compared to the first axis 216 upon which thefirst electrical connectors 206 for macro cells 200A, 200B extend.Additionally, the first electrical connectors 206 for both macro cell200C and 200D extend along axis 404, 406 that are parallel to axis 218,302.

The third electrical connectors 214 for macro cells 200A, 200D extendalong a common axis 220 and are electrically connected together. Thethird electrical connectors 214 for macro cells 200B, 200C extend alonga common axis 304 and are electrically connected together. However, thethird electrical connectors 214 for macro cells 200A, 200D are notelectrically connected to the third electrical connectors 214 for macrocells 200B, 200C. Additionally, the three-terminal devices 208 for macrocells 200A, 200D extend along a common axis, axis 222 and areelectrically connected together. The three-terminal devices 208 formacro cells 200B, 200C extend along a common axis 306 and areelectrically connected together. However, the three-terminal devices 208for macro cells 200A, 200D are not electrically connected to thethree-terminal devices 208 for macro cells 200B, 200C.

A PCM-based building block can be arranged in more than one plane sothat a 3D PCM memory array is fabricated. FIG. 5 is a schematicisometric view of a 3D PCM-based memory array 500 having a plurality ofmacro cells 200A-200H. The array 500 shows the macro cells 200A-200Drotated counterclockwise 90 degrees from the view shown in FIG. 4. Fouradditional macro cells 200E-200H are shown, but the macro cells200E-200H are disposed over the macro cells 200A-200D and areelectrically isolated from macro cells 200A-200D by electricallyinsulating spacers 204. It is contemplated that additional macro cellscould be formed above macro cells 200E-200H and would be electricallyisolated by electrically insulating spacers 502.

As shown in FIG. 5, the first electrical connectors 206 for macro cells200E, 200F extend along an axis 508 that is parallel to axis 216.Additionally, the first electrical connectors 206 for macro cells 200E,200F are electrically coupled to the first electrical connectors 206 formacro cells 200A, 200B by element 512. It is to be understood thatelement 512 comprises electrically conductive material such as wiringthat connects the first electrical connectors 206 to transistors in thesubstrate. The first electrical connector 206 for macro cell 200Eextends along axis 218, and the first electrical connector 206 for macrocell 200F extends along axis 302.

As also shown in FIG. 5, the first electrical connectors 206 for macrocells 200G, 200H extend along an axis 510 that is parallel to axis 402.Additionally, the first electrical connectors 206 for macro cells 200G,200H are electrically coupled to the first electrical connectors 206 formacro cells 200C, 200D by element 514. It is to be understood thatelement 514 comprises electrically conductive material such as wiringthat connects the first electrical connectors 206 to transistors in thesubstrate. The first electrical connector 206 for macro cell 200Gextends along axis 404, and the first electrical connector 206 for macrocell 200H extends along axis 406.

As also shown in FIG. 5, the third electrical connectors 214 for macrocells 200F, 200G extend along an axis 506 that is parallel to axis 304.Additionally, the third electrical connectors 214 for macro cells 200F,200G are electrically coupled to the third electrical connectors 214 formacro cells 200B, 200C by element 516. It is to be understood thatelement 516 comprises electrically conductive material such as wiringthat connects the third electrical connectors 214 to transistors in thesubstrate. The third electrical connector 214 for macro cell 200Fextends along axis 302, and the third electrical connector 214 for macrocell 200G extends along axis 404.

It is to be understood that the third electrical connectors 214 formacro cells 200E, 200H extend along an axis that is parallel to axis220. Additionally, the third electrical connectors 214 for macro cells200E, 200H are electrically coupled to the third electrical connectors214 for macro cells 200A, 200D by element 518. Element 518 compriseselectrically conductive material such as wiring that connects the thirdelectrical connectors 214 to transistors in the substrate. The thirdelectrical connector 214 for macro cell 200E extends along axis 218, andthe third electrical connector 206 for macro cell 200H extends alongaxis 406.

The three-terminal devices 208 of macro cells 200F, 200G extend along acommon axis 504 that is parallel to axis 306 and are electricallycoupled together. Similarly, MESFETs 208 of macro cells 200E, 200Hextend along a common axis that is parallel to axis 222 and areelectrically coupled together.

FIGS. 6A-6D are schematic isometric illustrations of a 3D PCM-basedarray 600 according to one embodiment. In the embodiment shown, the PCMarray 600 includes four separate levels of macro cells with a total ofsixty-four macro cells per level. Within each level, there are eightrows 602 that extend in a first direction and eight rows 604 that extendin a second direction perpendicular to the first direction. Each of therows 602 is coupled to a corresponding element that compriseselectrically conductive material, such as wiring, to connect the thirdelectrical connectors 214 to transistors in the substrate. While onlytwo elements 516, 518 have been shown, it is to be understood that eachrow 602 has a corresponding element for electrical connection and thateach element is connected to each third electrical connector 214 withinthe entire row 602. Thus, eight elements would be present for theembodiment shown in FIGS. 6A-6D, but for clarity, only elements 516, 518have been shown. Additionally, it is understood that the thirdelectrical connectors 214 within a common row 602 in one level areelectrically connected to the third electrical connectors 214 within thesame row that are on a different level. Similarly, each of the rows 604is coupled to a corresponding element that comprises electricallyconductive material, such as wiring, to connect the first electricalconnectors 206 to transistors in the substrate. While only two elements512, 514 have been shown, it is to be understood that each row 604 has acorresponding element for electrical connection and that each element isconnected to each first electrical connector 206 within the entire row604. Thus, eight elements would be present for the embodiment shown inFIGS. 6A-6D, but for clarity, only elements 512, 514 have been shown.Additionally, it is understood that the first electrical connectors 206within a common row 604 in one level re electrically connected to thefirst electrical connectors 206 within the same row that are on adifferent level.

For the three-terminal devices 208, all of the three-terminal devices208 within a common level are electrically coupled together as shown inFIGS. 6C and 6D. All of the three-terminal devices 208 within a givenlevel electrically couple together with electrical connectors 606A-606D,such as wiring, that spans across the level and then down to thesubstrate to provide electrical connection to a transistor. In theembodiment shown in FIGS. 6A-6D, there are four levels and hence, onlyfour electrical connections to the transistors on the substrate for thethree-terminal devices 208. By selecting one row 602, one row 604 andone electrical connector 606A-606D, a single macro cell 200 can beaddressed.

For the embodiment shown in FIGS. 6A-6D, the PCM array 600 is an 8×8×43D arrangement of macro cells, but it is contemplated that anyelectrically programmable/readable memory cell, as opposed to a PCMcell, may be arranged in such a manner. Each macro cell 200 is addressedby the interception of three planes. Therefore, the overhead wiring isminimal. For the footprint over the substrate, an additional 2 FNx area(for the x-direction planes), 2 FNy area (for the y-direction planes)and 4 FNz area (for the z-direction planes), where F is the half pitchcritical dimension for the lithography used, Nx, Ny and Nz are thenumber of cells in the x, y, and z dimensions, is all that is requiredfor addressing any cell in the full 3D structure. Therefore, the numberof memory cells grows with NxNyNz (i.e., N³) whereas the footprintoverhead for addressability is a linear function of Nx, Ny and Nz.

For the embodiment shown in FIGS. 6A-6D, a total of 256 macro cells 200are present, yet only 20 transistors are necessary on the substrate toaddress each macro cell 200 individually. Rather than providing threeseparate electrical connections to each macro cell, which wouldnecessitate 768 transistors, the macro cells 200 can share transistors,yet be uniquely addressed. Because only 20 transistors are necessary onthe substrate, the PCM array 600 utilizes a very small amount ofsubstrate area outside of the footprint of the PCM array 600.Additionally, no overhead wiring is necessary to address the macro cells200 in the middle of the PCM array 600. One can easily imagine that if768 transistors were utilized, electrically connecting the 768transistors to the macro cells 200 would be quite complex. Even if themacro cells 200 were stacked in a 3D arrangement, electricallyconnecting 768 transistors to the PCM array 600 would be much morecomplex than connecting 20 transistors external to the 3D memory cellarray. Thus, the 3D PCM array arrangement disclosed herein provides amuch less complex wiring strategy, utilizes fewer transistors, and has asmaller footprint over the substrate.

The PCM arrays disclosed herein are scalable 3D arrangements. It is tobe understood that the description herein is not limited to PCMs, butrather is applicable to any memory with memory cell elements queried bycurrent and it uses a small footprint even in the case where a highcurrent 3D access (i.e., selecting) device capability is a requirement.The embodiments disclosed herein are scalable, yet have a low footprintoverhead with regards to the 3D architectural arrangement of the cells.The wiring that is over the entire cell is minimal to query a macro cellin the middle of the 3D cell and thus diminishes the overheadcontribution to the footprint of the device.

FIGS. 7A-7C are schematic illustrations of a MESFET three-terminaldevice 208 according to one embodiment. FIG. 7B is a cross-sectionalview taken along line A-A from FIG. 7A, and FIG. 7C is a cross-sectionalview taken along line B-B from FIG. 7A. The MESFET includes asurrounding gate electrode 702 and a channel 704. The surrounding gateelectrode 702 comprises a noble metal such as the noble metals that makeschottky junctions with the channel 704. The channel 704 comprisespolysilicon. A source electrode 708 is shown as is a drain electrode706. The source electrode 708 is simply the first electrical connector206 while the drain electrode 706 is the second electrical connector 210from the macro cell 200. The electric current flows from source 708 todrain 706 of the MESFET as a function of the voltage or current appliedto the gate electrode 702. Depending on the three-terminal device beingdesigned as enhancement or depletion operation, a zero voltage appliedto the gate electrode relative to source will allow current flow fromsource to drain. In the case of an enhancement MESFET, its necessarygate voltages differ from zero voltage to allow current flow from sourceto drain. A depletion mode MESFET will allow current to flow from sourceto drain with a zero voltage from gate to source, while current flow isblocked by changing the gate voltage to some other finite value. Thecurrent then flows from the drain electrode 706 to the memory cell 212.Because the MESFET 208 is a surround gate MESFET, the surrounding gateelectrode 702 can be arrayed across a plurality of macro cells 200 asshown in FIGS. 6A-6D and permit control of the ‘on’ or ‘off’ of theMESFET from a single external contact. The channel 704 comprisespolysilicon and can be either n-type or p-type. Because the channel 704is doped, the channel 704 will be more conductive than diode devices ofcomparable cross section area. Polysilicon is also chosen as the channel704 because of the limited thermal budget requirements in back-endprocessing for PCM cells over a substrate prefabricated with standardCMOS transistors. Polysilicon is advantageous over other alternativesbecause polysilicon is fully compatible with standard CMOS fabricationprocesses and can take advantage of volume production of alreadyestablished CMOS fabs.

A method for addressing a PCM cell will now be discussed with referenceto the Figures. Initially, a particular macro cell 200 is chosen. Then,current is applied to a plurality of first electrical connectors 206, aplurality of third electrical connectors 214 and a plurality of gateelectrodes 702 of a plurality of MESFETs 208. A total of threetransistors are utilized to apply the electrical currents, yet numerousmacro cells 200 receive the electrical current. However, only one macrocell 200 receives all three currents. The current applied to theplurality of first electrical connectors 206 is applied to a pluralityof first electrical connectors 206 that lie in a common plane and areall electrically coupled together. The current applied to the pluralityof first electrical connectors 206 may be thought of as the “X”coordinate in an “X-Y-Z” 3D orientation.

The current applied to the plurality of third electrical connectors 214is applied to a plurality of third electrical connectors 214 that lie ina common plane and are all electrically coupled together. The thirdelectrical connectors 214 to which the current is applied lie in a planethat is perpendicular to the plane in which the first electricalconnectors that have current applied thereto lie. The current applied tothe third electrical connectors 214 may be thought of as the “Y”coordinate in an “X-Y-Z” 3D orientation.

In a 3D structure, identifying only two coordinates does not result in asingle location, but, rather, multiple locations within the “Z” plane.Thus, the “Z” coordinate is necessary. Similarly, to address a singlemacro cell 200, the third current is applied to the gate electrode 702of a plurality of MESFETs 208. The current applied to the gateelectrodes 702 of the plurality of MESFETs 208 may be thought of as the“Z” coordinate in an “X-Y-Z” 3D orientation. The plurality of MESFETS208 that have current applied thereto lie in a common plane which isperpendicular to each of the planes to which the first and thirdelectrical connector 206, 214 having electrical current applied theretolie. The three currents, while applied to multiple first electricalconnectors 206, multiple third electrical connectors 214, and multipleMESFETs 208 are collectively applied to only one specific macro cell200.

The PCM cells disclosed herein are scalable 3D arrangements. It is to beunderstood that the description herein is not limited to PCMs, butrather is applicable to any memory with memory cell elements queried bycurrent. It uses small footprint even in the case where high current 3Daccess (i.e., selecting) device capability is a requirement. Theembodiments disclosed herein are scalable, yet have a low footprintoverhead with regards to the 3D architectural arrangement of the cells.The wiring that is over the entire cell is minimal to query a macro cellin the middle of the 3D cell and thus diminishes the overheadcontribution to the footprint of the device. The 3D design, and the useof a surround gate MESFET, permits a single macro cell to be addressedwhile applying voltage to multiple macro cells.

While the foregoing is directed to embodiments of the present invention,other and further embodiments of the invention may be devised withoutdeparting from the basic scope thereof, and the scope thereof isdetermined by the claims that follow.

What is claimed is:
 1. A three-dimensional solid state array of memorycells, comprising: a three-terminal device; a first electrical connectorcoupled to the three-terminal device, the first electrical connectorextending along a first axis and a second axis perpendicular to thefirst axis; a second electrical connector coupled to the three-terminaldevice; a memory cell coupled to second electrical connector, the memorycell disposed along the second axis; and a third electrical connectorcoupled to the memory cell, the third electrical connector extendingalong the second axis and along a third axis perpendicular to both thesecond axis and the first axis.
 2. The three dimensional solid statearray of memory cells of claim 1, where the three-terminal device iscapable of conducting current in two directions to program the memorycell.
 3. The three-dimensional solid state array of memory cells ofclaim 1, wherein the three-terminal device is a surrounding gateelectrode MESFET.
 4. The three-dimensional solid state array of memorycells of claim 3, wherein the MESFET comprises a channel and wherein thechannel comprises polysilicon.
 5. The three-dimensional solid statearray of memory cells of claim 4, wherein the polysilicon is doped. 6.The three-dimensional solid state array of memory cells of claim 5,wherein the gate electrode comprises a noble metal.
 7. Thethree-dimensional solid state array of memory cells of claim 6, whereinthe channel comprises a first end and a second end, wherein the firstend is coupled to the first electrical connection and functions as asource electrode and wherein the second end is coupled to the secondelectrical connection and functions as a drain electrode.
 8. Thethree-dimensional solid state array of memory cells of claim 1, whereinthe three-terminal device comprises a channel that has a first end and asecond end, wherein the first end is coupled to the first electricalconnection and functions as a source electrode and wherein the secondend is coupled to the second electrical connection and functions as adrain electrode.
 9. The three-dimensional solid state array of memorycells of claim 8, wherein the three-terminal device is a MESFET, whereinthe channel comprises polysilicon and wherein the MESFET comprises agate electrode that comprises a noble metal.
 10. A method of addressinga memory cell in a three-dimensional solid state array of memory cells,the memory cell comprising: a three-terminal device; a first electricalconnector coupled to the three-terminal device, the first electricalconnector extending along a first axis and a second axis perpendicularto the first axis; a second electrical connector coupled to thethree-terminal device; a memory cell coupled to second electricalconnector, the memory cell disposed along the second axis; and a thirdelectrical connector coupled to the memory cell, the third electricalconnector extending along the second axis and a third axis perpendicularto both the second axis and the first axis, the method comprising:applying an electrical voltage or current to the first electricalconnector; applying an electrical voltage or current to the thirdelectrical connector; and applying an electrical voltage or current tothe three-terminal device.
 11. The method of claim 10, wherein applyingan electrical current to the three-terminal device comprises applying acurrent to a gate electrode of the three-terminal device to permit theelectrical current applied to the first electrical connector to flowthrough a channel of the three-terminal device to the second electricalconnector and to the memory cell.
 12. The method of claim 11, where thethree-terminal device is capable of conducting current in two directionsto program the memory cell.
 13. The method of claim 12, wherein thethree-terminal device is a surrounding gate electrode MESFET.
 14. Themethod of claim 13, wherein the MESFET comprises a channel and whereinthe channel comprises polysilicon.
 15. The method of claim 14, whereinthe polysilicon is doped.
 16. The method of claim 15, wherein the gateelectrode comprises a noble metal.
 17. A method of addressing a memorycell in a three-dimensional solid state array of memory cells, thememory cell comprising a plurality of macro cells that each comprise athree-terminal device; a first electrical connector coupled to thethree-terminal device, the first electrical connector extending along afirst axis and a second axis perpendicular to the first axis; a secondelectrical connector coupled to the three-terminal device; a memory cellcoupled to second electrical connector, the memory cell disposed alongthe second axis; and a third electrical connector coupled to the memorycell, the third electrical connector extending along the second axis anda third axis perpendicular to both the second axis and the first axis,the method comprising: applying a first electrical voltage or current tothe first electrical connectors of a first plurality of macro cells;applying a second electrical voltage or current to the second electricalconnectors of a second plurality of macro cells; and applying a thirdelectrical voltage or current to the three-terminal device of a thirdplurality of macro cells, wherein the first electrical current, thesecond electrical current and the third electrical current arecollectively applied to a single macro cell.
 18. The method of claim 17,wherein the first plurality of macro cells are arranged in a firstplane.
 19. The method of claim 18, wherein the second plurality of macrocells are arranged in a second plane that is perpendicular to the firstplane.
 20. The method of claim 19, wherein the third plurality of macrocells are arranged in a third plane that is perpendicular to both thefirst plane and the second plane.
 21. The method of claim 20, whereinapplying a third electrical current comprises applying the thirdelectrical current to a gate electrode of each of the three-terminaldevices of the third plurality of macro cells to permit the electricalcurrent applied to the first electrical connector to flow through achannel of the three terminal device to the second electrical connectorand to the memory cell.
 22. The method of claim 21, wherein thethree-terminal device is a MESFET, wherein the MESFET is a surroundinggate electrode MESFET that comprises a channel, and wherein the channelcomprises doped polysilicon, and wherein the gate electrode comprises anoble metal.